Abstract
The status of FET-based sensors for the measurements of physical, chemical, and environmental factors is reviewed. Attention is given to advances in MOSFET devices incorporating surface charges in a silicon chip depending on the electric field in an adjacent insulator. Among the FET-based sensor systems discussed are: Open Gate FETs (OGFETs); Charge Flow Transistors (CFTs); Pressure Sensitive FETs (PRESSFETs); and chemical sensitive FETs (CHEMFETs). The status of biological active FET sensors (BIOFETs) is also reviewed.
- Publication:
-
Sensors and Actuators
- Pub Date:
- October 1985
- Bibcode:
- 1985SeAc....8..109B
- Keywords:
-
- Electronic Transducers;
- Field Effect Transistors;
- Metal Oxide Semiconductors;
- Sensors;
- Technology Assessment;
- Charge Flow Devices;
- Chips (Electronics);
- Electrical Properties;
- Silicon Transistors;
- Electronics and Electrical Engineering